JPS6280337U - - Google Patents
Info
- Publication number
- JPS6280337U JPS6280337U JP17219885U JP17219885U JPS6280337U JP S6280337 U JPS6280337 U JP S6280337U JP 17219885 U JP17219885 U JP 17219885U JP 17219885 U JP17219885 U JP 17219885U JP S6280337 U JPS6280337 U JP S6280337U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- heat treatment
- semiconductor wafer
- treatment jig
- quarter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17219885U JPS6280337U (en]) | 1985-11-08 | 1985-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17219885U JPS6280337U (en]) | 1985-11-08 | 1985-11-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6280337U true JPS6280337U (en]) | 1987-05-22 |
Family
ID=31108521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17219885U Pending JPS6280337U (en]) | 1985-11-08 | 1985-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280337U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5720151B2 (en]) * | 1974-03-25 | 1982-04-27 | ||
| JPS6045428B2 (ja) * | 1977-02-23 | 1985-10-09 | 株式会社リコー | 両面複写装置のコピ−紙給送装置 |
-
1985
- 1985-11-08 JP JP17219885U patent/JPS6280337U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5720151B2 (en]) * | 1974-03-25 | 1982-04-27 | ||
| JPS6045428B2 (ja) * | 1977-02-23 | 1985-10-09 | 株式会社リコー | 両面複写装置のコピ−紙給送装置 |